The last two decades have seen significant advances in the development of micro electro mechanical systems (MEMS) for use as sensors. MEMS based sensors have applications in fields of science ranging from physical and chemical sensing to biological disease diagnosis. The major advantages of MEMS sensors over conventional sensors include their potential for higher sensitivity, lower cost, smaller sample size, and label-free detection. Another important distinction is that MEMS sensors can easily be multiplexed to simultaneously detect multiple analytes. MEMS technology holds promise as the next generation of high sensitivity sensors.